Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Figure 11

Figure 12

Performance parameters of the graphene terahertz photodetectors reported in this article
| Mechanism | Manufacturing method | Working frequency | Working temperature | NEP | Responsivity | Response time | Ref. |
|---|---|---|---|---|---|---|---|
| PV | CVD | 2 THz | RT | 150 nW/Hz1/2 | 34 μA/W | — | [105] |
| PTE | ME | 2.52 THz | RT | <1.1 nW/Hz1/2 | >10 V/W | 10.5–110 ps | [106] |
| ME | 2.1 THz | RT | 1.7 nW/Hz1/2 | 4.9 V/W | — | [107] | |
| ME | 1.8–4.2 THz | RT | 80 pW/Hz1/2 | 105 V/W | <30 ns | [46] | |
| ME | 3 THz | RT | <160 pW/Hz1/2 | 49 V/W | <3.3 ns | [47] | |
| ME | 3.4 THz | RT | 120 pW/Hz1/2 | 50 V/W | 890 ps | [109] | |
| CVD | 2.8 THz | RT | 1 nW/Hz1/2 | >3 V/W | 5 ns | [110] | |
| CVD | 2.52/3.11 THz | RT | 9.3 nW/Hz1/2 (2.52 THz) | 3.16/2.39 V/W | 25 μs | [48] | |
| ME | 0.13 THz | 25 K | 36 fW/Hz1/2 | 50 kV/W | — | [111] | |
| ME | 0.19–0.26 THz | RT | 58 pW/Hz1/2 | 30 V/W | <0.83 ns | [112] | |
| CVD | 0.4 THz | RT | 114 pW/Hz1/2 | 63 V/W | — | [113] | |
| CVD | 2.86 THz | RT | <300 pW/Hz1/2 | >40 V/W | <5 ns | [114] | |
| PWR | ME | 0.3 THz | RT | 30 nW/Hz1/2 | 150 mV/W | — | [35] |
| SiC EG | 0.33 THz | RT | 51 pW/Hz1/2 | 30 V/W | — | [121] | |
| ME | 0.3 THz | 4.5 K/RT | 0.81 pW/Hz1/2/0.67 nW/Hz1/2 | 0.216 A/W/1.9 mA/W | — | [120] | |
| ME | 2 THz | 10 K | 0.2 pW/Hz1/2 | 240 V/W | — | [102] | |
| ME | 0.3 THz | 10 K | — | 0.29 A/W | — | [119] | |
| PC | CVD | 0.02–0.15 THz | RT | 0.5 nW/Hz1/2 | 400 V/W | 2 μs | [122] |
| BM | SiC EG | 0.7–4 THz | 2.5 K | 0.2 fW/Hz1/2 | 5 | <2.5 ns | [123] |
| CVD | 2/2.7 THz | RT | — | 2 mA/W | — | [124] | |
| SiC EG | 0.3–1.6 THz | 3 K | 5.6 pW/Hz1/2 | — | — | [125] | |
| SiC EG | 0.3–1.6 THz | 0.3 K | 15 fW/Hz1/2 | — | — | [135] | |
| SiC EG | 1.4 THz | 0.1–0.6 K | 0.25–0.5 fW/Hz1/2 | — | — | [136] |