Stereometric analysis of Ta2O5 thin films
Authors
Dinara Sobola
Brno University of Technology, Faculty of Electrical Engineering and Communication, Physics Department, Brno
Pavel Kaspar
Brno University of Technology, Faculty of Electrical Engineering and Communication, Physics Department, Brno
Jindrich Oulehla
Brno University of Technology, Faculty of Electrical Engineering and Communication, Physics Department, Brno
Ştefan Ţălu
Technical University of Cluj-Napoca, The Directorate of Research, Development and Innovation Management (DMCDI), Cluj-Napoca, Romania
Nikola Papež
Brno University of Technology, Faculty of Electrical Engineering and Communication, Physics Department, Brno
DOI: https://doi.org/10.2478/msp-2019-0083 | Journal eISSN: 2083-134X (formerly 2083-124X) | Journal ISSN: 2083-1331
Language: English
Submitted on: Oct 4, 2018
Accepted on: Apr 23, 2019
Published on: Jan 10, 2020
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
Keywords:
Related subjects:
© 2020 Dinara Sobola, Pavel Kaspar, Jindrich Oulehla, Ştefan Ţălu, Nikola Papež, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.