Research on the influence of the filtrating electrode on the structure and optical properties of TiO2 thin films prepared by the energy filtering magnetron sputtering technique

Wang, Zhaoyong; Jiang, Weifen; Lu, Yifan; Wang, Xinlian; Huang, Xiaoya; Yao, Ning

doi:10.2478/msp-2019-0082

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Research on the influence of the filtrating electrode on the structure and optical properties of TiO2 thin films prepared by the energy filtering magnetron sputtering technique

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