Pixel level vacuum packaging for single layer microbolometer detectors with on pixel lens
Authors
Department of Electrical-Electronics Engineering, Adana Alparslan Turkes Science and Technology University, Metu Mems Center, Middle East Technical University, Adana
Language: English
Page range: 203 - 208
Submitted on: Jun 4, 2022
Published on: Jul 11, 2022
Published by: Slovak University of Technology in Bratislava
In partnership with: Paradigm Publishing Services
Publication frequency: 6 issues per year
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© 2022 M. Yusuf Tanrikulu, published by Slovak University of Technology in Bratislava
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.