Preparation and gas-sensing properties of very thin sputtered NiO films

Hotovy, Ivan; Rehacek, Vlastimil; Kemeny, Martin; Ondrejka, Peter; Kostic, Ivan; Mikolasek, Miroslav; Spiess, Lothar

Preparation and gas-sensing properties of very thin sputtered NiO films

Journal of Electrical Engineering

Volume 72 (2021): Issue 1 (February 2021)

By:

Ivan Hotovy, Vlastimil Rehacek, Martin Kemeny, Peter Ondrejka, Ivan Kostic, Miroslav Mikolasek and Lothar Spiess

Open Access

|Mar 2021

References

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DOI: https://doi.org/10.2478/jee-2021-0009 | Journal eISSN: 1339-309X | Journal ISSN: 1335-3632

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Language: English

Page range: 61 - 65

Submitted on: Jan 20, 2021

Published on: Mar 18, 2021

Published by: Slovak University of Technology in Bratislava

In partnership with: Paradigm Publishing Services

Publication frequency: 6 issues per year

Keywords:

NiO films,

reactive magnetron sputtering,

alumina substrate,

gas sensors,

acetone,

toluene,

n-butyl acetate

Related subjects:

Engineering,

Introductions and overviews,

Engineering, other

© 2021 Ivan Hotovy, Vlastimil Rehacek, Martin Kemeny, Peter Ondrejka, Ivan Kostic, Miroslav Mikolasek, Lothar Spiess, published by Slovak University of Technology in Bratislava
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

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