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Preparation and gas-sensing properties of very thin sputtered NiO films Cover

Preparation and gas-sensing properties of very thin sputtered NiO films

Journal of Electrical Engineering
Volume 72 (2021): Issue 1 (February 2021)
By: Ivan Hotovy,  Vlastimil Rehacek,  Martin Kemeny,  Peter Ondrejka,  Ivan Kostic,  Miroslav Mikolasek and  Lothar Spiess  
Open Access
|Mar 2021

Authors

Ivan Hotovy

ivan.hotovy@stuba.sk

Institute of Electronics and Photonics, Slovak University of Technology, Bratislava, Slovakia

Vlastimil Rehacek

Institute of Electronics and Photonics, Slovak University of Technology, Bratislava, Slovakia

Martin Kemeny

Institute of Electronics and Photonics, Slovak University of Technology, Bratislava, Slovakia

Peter Ondrejka

Institute of Electronics and Photonics, Slovak University of Technology, Bratislava, Slovakia

Ivan Kostic

Institute of Informatics, Slovak Academy of Sciences, Bratislava, Slovakia

Miroslav Mikolasek

Institute of Electronics and Photonics, Slovak University of Technology, Bratislava, Slovakia

Lothar Spiess

Department of Materials Technology, Technical University of Ilmenau, Ilmenau, Germany
DOI: https://doi.org/10.2478/jee-2021-0009 | Journal eISSN: 1339-309X | Journal ISSN: 1335-3632
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Language: English
Page range: 61 - 65
Submitted on: Jan 20, 2021
|
Published on: Mar 18, 2021
Published by: Slovak University of Technology in Bratislava
In partnership with: Paradigm Publishing Services
Publication frequency: 6 issues per year
Keywords:
NiO films,
reactive magnetron sputtering,
alumina substrate,
gas sensors,
acetone,
toluene,
n-butyl acetate
Related subjects:
Engineering,
Introductions and overviews,
Engineering, other

© 2021 Ivan Hotovy, Vlastimil Rehacek, Martin Kemeny, Peter Ondrejka, Ivan Kostic, Miroslav Mikolasek, Lothar Spiess, published by Slovak University of Technology in Bratislava
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

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