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A study of properties of ZrO2 thin films deposited by magnetron sputtering under different plasma parameters: Biomedical application Cover

A study of properties of ZrO2 thin films deposited by magnetron sputtering under different plasma parameters: Biomedical application

Journal of Electrical Engineering
Volume 70 (2019): Issue 7 (December 2019)
By: Hind Zegtouf,  Nadia Saoula,  Mourad Azibi,  Larbi Bait,  Noureddine Madaoui,  Mohamed Redha Khelladi and  Mohamed Kechouane  
Open Access
|Sep 2019

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DOI: https://doi.org/10.2478/jee-2019-0052 | Journal eISSN: 1339-309X | Journal ISSN: 1335-3632
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Language: English
Page range: 117 - 121
Submitted on: Mar 19, 2019
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Published on: Sep 28, 2019
Published by: Slovak University of Technology in Bratislava
In partnership with: Paradigm Publishing Services
Publication frequency: 6 issues per year
Keywords:
ZrO2,
magnetron sputtering,
thin films,
hardness,
corrosion
Related subjects:
Engineering,
Introductions and overviews,
Engineering, other

© 2019 Hind Zegtouf, Nadia Saoula, Mourad Azibi, Larbi Bait, Noureddine Madaoui, Mohamed Redha Khelladi, Mohamed Kechouane, published by Slovak University of Technology in Bratislava
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

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