Approximate methods for the optical characterization of inhomogeneous thin films: Applications to silicon nitride films
Authors
Ivan Ohlídal
Department of Physical Electronic, Faculty of Science, Masaryk University, Brno
Jiří Vohánka
Department of Physical Electronic, Faculty of Science, Masaryk University, Brno
Daniel Franta
Department of Physical Electronic, Faculty of Science, Masaryk University, Brno
Martin Čermák
Department of Physical Electronic, Faculty of Science, Masaryk University, Brno
Jaroslav Ženíšek
Department of Physical Electronic, Faculty of Science, Masaryk University, Brno
Petr Vašina
Department of Physical Electronic, Faculty of Science, Masaryk University, Brno
Language: English
Page range: 16 - 26
Submitted on: Mar 19, 2019
Published on: Sep 28, 2019
Published by: Slovak University of Technology in Bratislava
In partnership with: Paradigm Publishing Services
Publication frequency: 6 issues per year
Related subjects:
© 2019 Ivan Ohlídal, Jiří Vohánka, Daniel Franta, Martin Čermák, Jaroslav Ženíšek, Petr Vašina, published by Slovak University of Technology in Bratislava
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.