Approximate methods for the optical characterization of inhomogeneous thin films: Applications to silicon nitride films
Language: English
Page range: 16 - 26
Submitted on: Mar 19, 2019
Published on: Sep 28, 2019
Published by: Slovak University of Technology in Bratislava
In partnership with: Paradigm Publishing Services
Publication frequency: 6 issues per year
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© 2019 Ivan Ohlídal, Jiří Vohánka, Daniel Franta, Martin Čermák, Jaroslav Ženíšek, Petr Vašina, published by Slovak University of Technology in Bratislava
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.