Modeling reactive magnetron sputtering: a survey of different modeling approaches
DOI: https://doi.org/10.2478/ausi-2020-0008 | Journal eISSN: 2066-7760
Language: English
Page range: 112 - 136
Submitted on: May 3, 2020
|Accepted on: Jun 8, 2020
|Published on: Jul 16, 2020
Published by: Sapientia Hungarian University of Transylvania
In partnership with: Paradigm Publishing Services
Publication frequency: 2 issues per year
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© 2020 Rossi Róbert Madarász, András Kelemen, Péter Kádár, published by Sapientia Hungarian University of Transylvania
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.