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Structural and Optical Properties of Aluminium Nitride Thin Films Fabricated Using Pulsed Laser Deposition and DC Magnetron Sputtering on Various Substrates Cover

Structural and Optical Properties of Aluminium Nitride Thin Films Fabricated Using Pulsed Laser Deposition and DC Magnetron Sputtering on Various Substrates

Advances in Materials Science
Volume 24 (2024): Issue 1 (March 2024)
By: Ihor Virt,  Piotr Potera,  Grzegorz Wisz,  Andrzej Dziedzic,  Bogumił Cieniek,  Ivan Lopatynskyi and  Marian Frugynskyi  
Open Access
|Mar 2024

Authors

Ihor Virt

Drohobych State Pedagogical University, Ukraine

Piotr Potera

ppotera@ur.edu.pl

Institute of Materials Engineering, College of Natural Sciences, University of Rzeszow, Poland

Grzegorz Wisz

Institute of Materials Engineering, College of Natural Sciences, University of Rzeszow, Poland

Andrzej Dziedzic

Institute of Physics, College of Natural Sciences, University of Rzeszow, Poland

Bogumił Cieniek

Institute of Materials Engineering, College of Natural Sciences, University of Rzeszow, Poland

Ivan Lopatynskyi

Lviv Polytechnic National University, Lviv, Ukraine

Marian Frugynskyi

Lviv Polytechnic National University, Lviv, Ukraine
DOI: https://doi.org/10.2478/adms-2024-0001 | Journal eISSN: 2083-4799 | Journal ISSN: 1730-2439
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Language: English
Page range: 5 - 16
Published on: Mar 16, 2024
Published by: Gdansk University of Technology
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year
Keywords:
thin solid films,
AlN,
optical properties,
structural properties,
PLD,
DC magnetron sputtering
Related subjects:
Materials sciences,
Functional and smart materials

© 2024 Ihor Virt, Piotr Potera, Grzegorz Wisz, Andrzej Dziedzic, Bogumił Cieniek, Ivan Lopatynskyi, Marian Frugynskyi, published by Gdansk University of Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

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