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Thickness Measurement of Aluminum Thin Film using Dispersion Characteristic of Surface Acoustic Wave Cover

Thickness Measurement of Aluminum Thin Film using Dispersion Characteristic of Surface Acoustic Wave

By: Ik Keun Park and  Tae Sung Park  
Open Access
|Feb 2020

Authors

Ik Keun Park

ikpark@seoultech.ac.kr

Department of Mechanical &Automotive Engineering Seoul National University of Science and Technology Seoul, Seoul, Korea

Tae Sung Park

taesung78@seoultech.ac.kr

Department of Mechanical Engineering Hanyang University Seoul, Seoul, Korea
Language: English
Page range: 1 - 4
Published on: Feb 15, 2020
In partnership with: Paradigm Publishing Services
Publication frequency: 1 issue per year

© 2020 Ik Keun Park, Tae Sung Park, published by Professor Subhas Chandra Mukhopadhyay
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.