Thickness Measurement of Aluminum Thin Film using Dispersion Characteristic of Surface Acoustic Wave
By:
Authors
Ik Keun Park
Department of Mechanical &Automotive Engineering Seoul National University of Science and Technology Seoul, Seoul, Korea
Tae Sung Park
Department of Mechanical Engineering Hanyang University Seoul, Seoul, Korea
DOI: https://doi.org/10.21307/ijssis-2019-049 | Journal eISSN: 1178-5608
Language: English
Page range: 1 - 4
Published on: Feb 15, 2020
Published by: Professor Subhas Chandra Mukhopadhyay
In partnership with: Paradigm Publishing Services
Publication frequency: 1 issue per year
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© 2020 Ik Keun Park, Tae Sung Park, published by Professor Subhas Chandra Mukhopadhyay
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.