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Thickness Measurement of Aluminum Thin Film using Dispersion Characteristic of Surface Acoustic Wave Cover

Thickness Measurement of Aluminum Thin Film using Dispersion Characteristic of Surface Acoustic Wave

International Journal on Smart Sensing and Intelligent Systems
Volume 7 (2014): Issue 5 (January 2014)
By: Ik Keun Park and  Tae Sung Park  
Open Access
|Feb 2020
DOI: https://doi.org/10.21307/ijssis-2019-049 | Journal eISSN: 1178-5608
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Language: English
Page range: 1 - 4
Published on: Feb 15, 2020
Published by: Professor Subhas Chandra Mukhopadhyay
In partnership with: Paradigm Publishing Services
Publication frequency: 1 issue per year
Keywords:
component,
scanning acoustic microscope,
V(z) curve,
dipersion;surface wave velocity,
thin film thickness
Related subjects:
Engineering,
Introductions and overviews,
Engineering, other

© 2020 Ik Keun Park, Tae Sung Park, published by Professor Subhas Chandra Mukhopadhyay
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

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