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Development and Characterization of Surface Micro-Machined MEMS Based Varactor Cover

Development and Characterization of Surface Micro-Machined MEMS Based Varactor

International Journal on Smart Sensing and Intelligent Systems
Volume 3 (2010): Issue 1 (January 2010)
By: Subha Chakraborty,  A. Bhattacharya,  Ashesh Ray Chaudhuri and  T.K. Bhattacharyya  
Open Access
|Dec 2017

Authors

Subha Chakraborty

subharpe@gmail.com

Dept. of Electronics and Electrical Communication Engineering, Indian Institute of Technology Kharagpur, Kharagpur, India

A. Bhattacharya

Dept. of Electronics and Electrical Communication Engineering, Indian Institute of Technology Kharagpur, Kharagpur, India

Ashesh Ray Chaudhuri

Advanced Technology Development Centre, Indian Institute of Technology Kharagpur, Kharagpur, India

T.K. Bhattacharyya

Dept. of Electronics and Electrical Communication Engineering, Indian Institute of Technology Kharagpur, Kharagpur, India
DOI: https://doi.org/10.21307/ijssis-2017-382 | Journal eISSN: 1178-5608
Journal RSS Feed
Language: English
Page range: 94 - 107
Published on: Dec 13, 2017
Published by: Professor Subhas Chandra Mukhopadhyay
In partnership with: Paradigm Publishing Services
Publication frequency: 1 issue per year
Keywords:
MEMS,
varactor,
VCO,
capacitance tuning ratio,
pull-in,
SEM,
vibration spectrum,
LDV
Related subjects:
Engineering,
Introductions and overviews,
Engineering, other

© 2017 Subha Chakraborty, A. Bhattacharya, Ashesh Ray Chaudhuri, T.K. Bhattacharyya, published by Professor Subhas Chandra Mukhopadhyay
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

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