Development and Characterization of Surface Micro-Machined MEMS Based Varactor

Chakraborty, Subha; Bhattacharya, A.; Chaudhuri, Ashesh Ray; Bhattacharyya, T.K.

Development and Characterization of Surface Micro-Machined MEMS Based Varactor

International Journal on Smart Sensing and Intelligent Systems

Volume 3 (2010): Issue 1 (January 2010)

By:

Subha Chakraborty, A. Bhattacharya, Ashesh Ray Chaudhuri and T.K. Bhattacharyya

Open Access

|Dec 2017

Abstract

This paper presents complete behavioral analysis of a surface micro-machined MEMS varactor for frequency tuning application in voltage controlled oscillators in RF applications with high Quality factor and tunability. The dimensions of the MEMS device have been optimized with Finite Element Method based CoventorWare analysis and verified through lumped parameter analysis in Saber platform. The MEMS varactor has been fabricated with the PolyMUMPs process. The paper also describes the Mechanical and electrical characterization of the MEMS varactor to meet the designed specification.

DOI: https://doi.org/10.21307/ijssis-2017-382 | Journal eISSN: 1178-5608

Journal RSS Feed

Language: English

Page range: 94 - 107

Published on: Dec 13, 2017

Published by: Professor Subhas Chandra Mukhopadhyay

In partnership with: Paradigm Publishing Services

Publication frequency: 1 issue per year

Keywords:

MEMS,

varactor,

VCO,

capacitance tuning ratio,

pull-in,

SEM,

vibration spectrum,

LDV

Related subjects:

Engineering,

Introductions and overviews,

Engineering, other

© 2017 Subha Chakraborty, A. Bhattacharya, Ashesh Ray Chaudhuri, T.K. Bhattacharyya, published by Professor Subhas Chandra Mukhopadhyay
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Previous article Volume 3 (2010): Issue 1 (January 2010)Next article