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Thermal Effects in Design of Integrated CMOS MEMS High Resolution Pressure Sensor Cover

Thermal Effects in Design of Integrated CMOS MEMS High Resolution Pressure Sensor

By: C. RoyChaudhuri,  S.K. Datta and  H. Saha  
Open Access
|Nov 2017
Language: English
Page range: 432 - 447
Published on: Nov 3, 2017
Published by: Professor Subhas Chandra Mukhopadhyay
In partnership with: Paradigm Publishing Services
Publication frequency: 1 issue per year

© 2017 C. RoyChaudhuri, S.K. Datta, H. Saha, published by Professor Subhas Chandra Mukhopadhyay
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.