A Design Analysis Of Micromirrors In Stacked Configurations With Moving Electrodes
By: Sangtak Park, So-Ra Chung and John T.W. Yeow
Authors
Sangtak Park
Department of Systems Design Engineering, University of Waterloo, Ontario, Canada
So-Ra Chung
John T.W. Yeow
DOI: https://doi.org/10.21307/ijssis-2017-303 | Journal eISSN: 1178-5608
Language: English
Page range: 480 - 497
Published on: Dec 13, 2017
Published by: Macquarie University, Australia
In partnership with: Paradigm Publishing Services
Publication frequency: 1 issue per year
Keywords:
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© 2017 Sangtak Park, So-Ra Chung, John T.W. Yeow, published by Macquarie University, Australia
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.