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A Design Analysis Of Micromirrors In Stacked Configurations With Moving Electrodes Cover

A Design Analysis Of Micromirrors In Stacked Configurations With Moving Electrodes

International Journal on Smart Sensing and Intelligent Systems
Volume 1 (2008): Issue 2 (January 2008)
By: Sangtak Park,  So-Ra Chung and  John T.W. Yeow  
Open Access
|Dec 2017

Authors

Sangtak Park

Department of Systems Design Engineering, University of Waterloo, Ontario, Canada

So-Ra Chung

John T.W. Yeow

jyeow@engmail.uwaterloo.ca

DOI: https://doi.org/10.21307/ijssis-2017-303 | Journal eISSN: 1178-5608
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Language: English
Page range: 480 - 497
Published on: Dec 13, 2017
Published by: Professor Subhas Chandra Mukhopadhyay
In partnership with: Paradigm Publishing Services
Publication frequency: 1 issue per year
Keywords:
Micromirror,
MEMS,
Electrostatic Force Actuation,
Deflection Angle,
Endoscope,
OCT (Optical Coherence Tomography),
Stacked Micromirror Configuration
Related subjects:
Engineering,
Introductions and overviews,
Engineering, other

© 2017 Sangtak Park, So-Ra Chung, John T.W. Yeow, published by Professor Subhas Chandra Mukhopadhyay
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

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