A Design Analysis Of Micromirrors In Stacked Configurations With Moving Electrodes

Sangtak Park; So-Ra Chung; John T.W. Yeow

doi:10.21307/ijssis-2017-303

.blurhash-client-img { display: none !important; }

A Design Analysis Of Micromirrors In Stacked Configurations With Moving Electrodes

International Journal on Smart Sensing and Intelligent Systems

Volume 1 (2008): Issue 2 (January 2008)

By: Sangtak Park, So-Ra Chung and John T.W. Yeow

Open Access

|Dec 2017

Abstract

Micromirrors fabricated by MEMS technology have demonstrated to be important sensing or actuating components in many industrial and biomedical applications such as laser scanning displays, optical switch matrices, and biomedical imaging systems. In this paper, various actuation mechanisms for micromirrors are described. A new geometric configuration of a stacked micromirror that is actuated by electrostatic force is proposed and analyzed to show its superior performance in terms of deflection angle, actuation voltage, and frequency response

References

1Stephen D. Sentruria, “Microsystem Design”, Kluwer Academic Publishers, 2001
Search in Google Scholar Back to article
2Tze Wei Yeow, K. L. Eddie Law, and Andrew A. Goldenberg. “SOI-Based 2-D MEMS L-Switching Matrix for Optical Networking.” IEEE Jounal of Selected Topics in Quantum Electronics, 2003: 603-613.10.1109/JSTQE.2003.813310
Search in Google Scholar Back to article
3J. T. W. Yeow, V. X. D. Yang, A. Chahwan, M. L. Gordon, B. Qi, I. A. Vitkin, B. C. Wilson, A. A. Goldenberg. “Micromachined 2-D scanner for 3-D optical coherence tomography.” Sensors and Actuators A:Physical, 2005: 331-340.10.1016/j.sna.2004.06.021
Search in Google Scholar Back to article
4Takayuki Iseki, Miki Okumura and Takashi Sugawara. “Two-Dimensionally Deflecting Mirror Using Electromagnetic Actuation.” Optical Review, 2006: 189-194.10.1007/s10043-006-0189-0
Search in Google Scholar Back to article
5Orphee Cugat, Jerome Delamare, and Gilbert Reyne. “Magnetic Micro-Actuators and Systems (MAGMAS).” IEEE Transactions on Magnetics, 2003: 3607-3612.10.1109/TMAG.2003.816763
Search in Google Scholar Back to article
6M R J Gibbs, E W Hill and P J Wright. “Magnetic materials for MEMS applications.” Journal of Physics D:Applied Physics, 2004: R237-R244.10.1088/0022-3727/37/22/R01
Search in Google Scholar Back to article
7Jonathan J. Bernstein, William P. Taylor, John D. Brazzle, Christopher J. Corcoran, Gregory Kirkos, Jefferson E. Odhner, Ajay Pareek, Marc Waelti, and Marvin Zai. “Electromagnetically Actuated Mirror Arrays for Use in 3-D Optical Switching Applications.” Journal of Microelectromechanical Systems, 2004: 526-535.10.1109/JMEMS.2004.828705
Search in Google Scholar Back to article
8Robbins, William P. “High-Displacement Piezoelectric Actuator Utilizing a Meander-Line Geometry-Part II:Therory.” IEEETransactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1991: 461-467.10.1109/58.8429118267608
Search in Google Scholar Back to article
9Young Ho Seo, Doo-Sun Choi, Joon-Hyung Lee, Taik-Min Lee, Tae-Jin Je and Kyung-Hyun Whang. “Piezoelectric Actuator Based on Stiffness Control and Stroke Amplication for Large Lateral Actuation.” IEEE International Conference on Micro Electro Mechanical Systems. 2005. 383-386.
Search in Google Scholar Back to article
10Janak Singh, Terence Gan, Ajay Agarwal, Mohanraj, Saxon Liw. “3D free space thermally actuated micromirror device.” Sensors and Actuators A: Physical, 2005: 468-475.10.1016/j.sna.2005.02.037
Search in Google Scholar Back to article
11Atre, Amarendra. “Analysis of out-of-plane thermal microactuators.” Journal of Micromechanics and Microengineering, 2006: 250-213.10.1088/0960-1317/16/2/003
Search in Google Scholar Back to article
12Jeffery F Rhoads, Steven W Shaw, and Kimberly L Turner, “ The nonlinear response of resonant microbeam systems with purely-parametric electrostatic actuation” Journal o f Micromechanics and Microengineering, 2006: 890-899.10.1088/0960-1317/16/5/003
Search in Google Scholar Back to article
13Feixia Pan, Joel Kubby, Eric Peeters, Alex T. Tran, Subrata Mukherjee. “Squeeze Film Damping Effect on the Dynamic Response of a MEMS Torsion Mirror.” International Conference on Modeling and Simulation of Microsystems. 1998. 474-479.
Search in Google Scholar Back to article
14Giuseppe Barillaro, Antonio Molfese, Andrea Nannini and Francesco Pieri. “Analysis, Simulation and relative performances of two kinds of serpentine springs.” Journal of Micromechnics and microengineering (IOP Publishing Ltd), 2005: 736-746.10.1088/0960-1317/15/4/010
Search in Google Scholar Back to article
15Jianliang You, Muthukumaran Packirisamy, Ion Stiharu. “Analysis, Simulation and Testing of a Micromirror with Rotational Serpentine Springs.” Intelligent Sensing and Information Processing. 2005. 219-225.10.1109/ICISIP.2005.1619439
Search in Google Scholar Back to article

Articles in this issue

DOI: https://doi.org/10.21307/ijssis-2017-303 | Journal eISSN: 1178-5608

Journal RSS Feed

Language: English

Page range: 480 - 497

Published on: Dec 13, 2017

Published by: Macquarie University, Australia

In partnership with: Paradigm Publishing Services

Publication frequency: 1 issue per year

Keywords:

Micromirror,

MEMS,

Electrostatic Force Actuation,

Deflection Angle,

Endoscope,

OCT (Optical Coherence Tomography),

Stacked Micromirror Configuration

Related subjects:

Engineering,

Introductions and overviews,

Engineering, other

© 2017 Sangtak Park, So-Ra Chung, John T.W. Yeow, published by Macquarie University, Australia
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Volume 1 (2008): Issue 2 (January 2008)