Porous Silicon Sensors- Elusive and Erudite

Saha, H.

doi:10.21307/ijssis-2017-277

Abstract

Porous Silicon Sensors have been fabricated and tested successfully over the last few years as humidity sensors, vapour sensors, gas sensors, piezoresistive pressure sensors and bio- sensors. In each case it has displayed remarkably sensitivity, relatively low temperature operation and ease of fabrication. Brief description of fabrication and properties of all these types of different sensors is reported in this paper. The barriers of porous silicon like contact, non- uniformity, instability etc. are also discussed.

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Porous Silicon Sensors- Elusive and Erudite

Abstract

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