Porous Silicon Sensors- Elusive and Erudite

H. Saha

doi:10.21307/ijssis-2017-277

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Porous Silicon Sensors- Elusive and Erudite

International Journal on Smart Sensing and Intelligent Systems

Volume 1 (2008): Issue 1 (January 2008)

By: H. Saha

Open Access

|Dec 2017

Abstract

Porous Silicon Sensors have been fabricated and tested successfully over the last few years as humidity sensors, vapour sensors, gas sensors, piezoresistive pressure sensors and bio- sensors. In each case it has displayed remarkably sensitivity, relatively low temperature operation and ease of fabrication. Brief description of fabrication and properties of all these types of different sensors is reported in this paper. The barriers of porous silicon like contact, non- uniformity, instability etc. are also discussed.

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