Have a personal or library account? Click to login
Contribution of the Refractive Index Fluctuations to the Length Noise in Displacement Interferometry Cover

Contribution of the Refractive Index Fluctuations to the Length Noise in Displacement Interferometry

Measurement Science Review
Volume 15 (2015): Issue 5 (October 2015)
By: Miroslava Holá,  Jan Hrabina,  Martin Sarbort,  Jindrich Oulehla,  Ondrej Cíp and  Josef Lazar  
Open Access
|Oct 2015

References

  1. [1] Leach, R.K., Boyd, R., Burke, T., Danzebrink, H.U., Dirscherl, K., Dziomba, T., et al. (2011). The European nanometrology landscape. Nanotechnology, 22 (6).10.1088/0957-4484/22/6/062001
    Search in Google Scholar
  2. [2] Neuschaefer-Rube, U., Neugebauer, M., Dziomba, T., Danzebrink, H.U., Koenders, L., Bosse, H. (2011). Recent developments of standards for 3D micro- and nanometrology. tm-Technisches Messen, 78 (3), 118-126.10.1524/teme.2011.0129
    Search in Google Scholar
  3. [3] Korpelainen, V., Seppa, J., Lassila, A. (2010). Design and characterization of MIKES metrological atomic force microscope. Precision Engineering, 34 (4), 735-744.10.1016/j.precisioneng.2010.04.002
    Search in Google Scholar
  4. [4] Haycocks, J., Jackson, K. (2005). Traceable calibration of transfer standards for scanning probe microscopy. Precision Engineering, 29 (2), 168-175.10.1016/j.precisioneng.2004.06.002
    Search in Google Scholar
  5. [5] Jansen, A., Rosielle, N., Schellekens, P. (1999). A fully elastically guided 3-D CMM with a measuring volume or 1 cm(3). In Fourteenth Annual Meeting of the American Society for Precision Engineering. ASPE, 452-455.
    Search in Google Scholar
  6. [6] Poyet, B., Ducourtieux, S. (2010). Advances in the development of the LNE metrological atomic force microscope. In Optical Micro- and Nanometrology III. Proc. SPIE 7718.10.1117/12.854201
    Search in Google Scholar
  7. [7] Werner, C., Rosielle, P.C.J.N., Steinbuch, M. (2010). Design of a long stroke translation stage for AFM. International Journal of Machine Tools & Manufacture, 50 (2), 183-190.10.1016/j.ijmachtools.2009.10.012
    Search in Google Scholar
  8. [8] Von Seggelen, J.K., Rosielle, P.C.J.N., Schellekens, P.H.J., Spaan, H.A.M., Bergmans, R.H., Kotte, G.J.W.L. (2005). An elastically guided machine axis with nanometer repeatability. CIRP Annals - Manufacturing Technology, 54 (1), 487-490.10.1016/S0007-8506(07)60151-6
    Search in Google Scholar
  9. [9] Haitjema, H., Rosielle, N., Kotte, G., Steijaert, H. (1998). Design and calibration of a parallel-moving displacement generator for nano-metrology. Measurement Science & Technology, 9 (7), 1098-1104.10.1088/0957-0233/9/7/016
    Search in Google Scholar
  10. [10] Jager, G., Manske, E., Hausotte, T. (2006). New applications of the Nanomeasuring Machine (NPMMachine) by novel optical and tactile probes with subnanometer repeatability. tm-Technisches Messen, 73 (9), 457-464.10.1524/teme.2006.73.9.457
    Search in Google Scholar
  11. [11] Eves, B.J. (2009). Design of a large measurementvolume metrological atomic force microscope (AFM). Measurement Science & Technology, 20 (8).10.1088/0957-0233/20/8/084003
    Search in Google Scholar
  12. [12] Edlen, B. (1966) The refractive index of air. Metrologia, 2 (2), 71-80.10.1088/0026-1394/2/2/002
    Search in Google Scholar
  13. [13] Birch, K.P., Downs, M.J. (1993). An updated edlen equation for the refractive-index of air. Metrologia, 30 (3), 155-162.10.1088/0026-1394/30/3/004
    Search in Google Scholar
  14. [14] Ciddor, P.E. (1996). Refractive index of air: New equations for the visible and near infrared. Applied Optics, 35 (9), 1566-1573.10.1364/AO.35.001566
    Search in Google Scholar
  15. [15] Birch, K.P., Downs, M.J. (1994). Correction to the updated edlen equation for the refractive-index of air. Metrologia, 31 (4), 315-316.10.1088/0026-1394/31/4/006
    Search in Google Scholar
  16. [16] Lazar, J., Cip, O., Cizek, M., Hrabina, J., Buchta, Z. (2011). Suppression of air refractive index variations in high-resolution interferometry. Sensors, 11 (8), 7644-7655.10.3390/s110807644
    Search in Google Scholar
  17. [17] Lazar, J., Hola, M., Cip, O., Cizek, M., Hrabina, J., Buchta, Z. (2012). Refractive index compensation in over-determined interferometric systems. Sensors, 12 (10), 14084-14094.10.3390/s121014084
    Search in Google Scholar
  18. [18] Lazar, J., Hola, M., Cip, O., Cizek, M., Hrabina, J., Buchta, Z. (2012). Displacement interferometry with stabilization of wavelength in air. Optics Express, 20 (25), 27830-27837.10.1364/OE.20.027830
    Search in Google Scholar
  19. [19] Mujumdar, A.K. (2014). Advanced Free Space Optics (FSO). Springer.
    Search in Google Scholar
  20. [20] Andrews, L.C., Phillips, R.L., Hopen, C.Y. (2001). Laser Beam Scintillation with Application. SPIE.10.1117/3.412858
    Search in Google Scholar
  21. [21] Ricklin, J.C., Hammel, S.M., Eaton, F.D., Lachinova, S.L. (2008). Atmospheric channel effects on freespace laser communication. In Free-Space Laser Communications: Principles and Advances. Springer, 9-56.
    Search in Google Scholar
  22. [22] Wheelon, A.D. (2001). Electron Scintillation. Cambridge University Press.
    Search in Google Scholar
  23. [23] Cip, O., Petru, F. (2000). A scale-linearization method for precise laser interferometry. Measurement Science & Technology, 11 (2), 133-141.10.1088/0957-0233/11/2/305
    Search in Google Scholar
  24. [24] Petru, F., Cip, O. (1999) Problems regarding linearity of data of a laser interferometer with a singlefrequency laser. Precision Engineering, 23, 39-50.10.1016/S0141-6359(98)00023-3
    Search in Google Scholar
  25. [25] Hrabina, J., Lazar, J., Klapetek, P., Cip, O. (2011). Multidimensional interferometric tool for the local probe microscopy nanometrology. Measurement Science & Technology, 22 (9).10.1088/0957-0233/22/9/094030
    Search in Google Scholar
  26. [26] Ducourtieux, S., Poyet, B. (2011). Development of a metrological atomic force microscope with minimized Abbe error and differential interferometer-based realtime position control. Measurement Science & Technology, 22 (9).10.1088/0957-0233/22/9/094010
    Search in Google Scholar
  27. [27] Hola, M., Lazar, J., Cip, O., Buchta, Z. (2014). Inbeam tracking refractometry for coordinate interferometric measurement. In Optical Micro- and Nanometrology V. Proc. SPIE 9132.
    Search in Google Scholar
DOI: https://doi.org/10.1515/msr-2015-0036 | Journal eISSN: 1335-8871
Journal RSS Feed
Language: English
Page range: 263 - 267
Submitted on: Mar 31, 2015
Accepted on: Oct 7, 2015
Published on: Oct 29, 2015
Published by: Slovak Academy of Sciences, Institute of Measurement Science
In partnership with: Paradigm Publishing Services
Publication frequency: Volume open
Keywords:
Nanometrology,
interferometry,
refractive index of air
Related subjects:
Engineering,
Electrical engineering,
Control engineering, metrology and testing

© 2015 Miroslava Holá, Jan Hrabina, Martin Sarbort, Jindrich Oulehla, Ondrej Cíp, Josef Lazar, published by Slovak Academy of Sciences, Institute of Measurement Science
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Previous articleVolume 15 (2015): Issue 5 (October 2015)Next article