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Al-doped ZnO films deposited by magnetron sputtering: effect of sputtering parameters on the electrical and optical properties Cover

Al-doped ZnO films deposited by magnetron sputtering: effect of sputtering parameters on the electrical and optical properties

Materials Science-Poland
Volume 35 (2017): Issue 2 (July 2017)
By: Qingtao Pan and  Xin Song  
Open Access
|Jul 2017

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DOI: https://doi.org/10.1515/msp-2017-0038 | Journal eISSN: 2083-134X | Journal ISSN: 2083-1331
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Language: English
Page range: 374 - 381
Submitted on: Sep 28, 2016
|
Accepted on: Feb 6, 2017
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Published on: Jul 26, 2017
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year
Keywords:
AZO thin films,
optical and electrical properties,
morphology
Related subjects:
Materials sciences,
Materials sciences, other,
Nanomaterials,
Functional and smart materials,
Materials characterization and properties

© 2017 Qingtao Pan, Xin Song, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

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