Controlled fluoridation of amorphous carbon films deposited at reactive plasma conditions
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Language: English
Page range: 606 - 611
Submitted on: Jan 13, 2014
Accepted on: May 31, 2015
Published on: Aug 30, 2016
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year
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© 2016 Alexander Yoffe, Ilya Zon, Yishay Feldman, Victor Shelukhin, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.