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Electrostatic field in terms of geometric curvature in membrane MEMS devices Cover

Electrostatic field in terms of geometric curvature in membrane MEMS devices

Open Access
|Jul 2017

Abstract

In this paper we present, in a framework of 1D-membrane Micro-Electro-Mechanical- Systems (MEMS) theory, a formalization of the problem of existence and uniqueness of a solution related to the membrane deformation u for electrostatic actuation in the steady- state case. In particular, we propose a new model in which the electric field magnitude E is proportional to the curvature of the membrane and, for it, we obtain results of existence by Schauder-Tychono's fixed point application and subsequently we establish conditions of uniqueness. Finally, some numerical tests have been carried out to further support the analytical results.

Language: English
Page range: 165 - 184
Submitted on: May 7, 2017
Accepted on: Jun 16, 2017
Published on: Jul 20, 2017
Published by: Italian Society for Applied and Industrial Mathemathics
In partnership with: Paradigm Publishing Services
Publication frequency: 1 issue per year

© 2017 Paolo Di Barba, Luisa Fattorusso, Mario Versaci, published by Italian Society for Applied and Industrial Mathemathics
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.