Integral equations for free-molecule ow in MEMS: recent advancements

Patrick Fedeli; Attilio Frangi

doi:10.1515/caim-2017-0004

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Integral equations for free-molecule ow in MEMS: recent advancements

Communications in Applied and Industrial Mathematics

Volume 8 (2017): Issue 1 (March 2017)

By: Patrick Fedeli and Attilio Frangi

Open Access

|Mar 2017

Abstract

We address a Boundary Integral Equation (BIE) approach for the analysis of gas dissipation in near-vacuum for Micro Electro Mechanical Systems (MEMS). Inspired by an analogy with the radiosity equation in computer graphics, we discuss an efficient way to compute the visible domain of integration. Moreover, we tackle the issue of near singular integrals by developing a set of analytical formulas for planar polyhedral domains. Finally a validation with experimental results taken from the literature is presented.

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Articles in this issue

DOI: https://doi.org/10.1515/caim-2017-0004 | Journal eISSN: 2038-0909

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Language: English

Page range: 67 - 80

Submitted on: Dec 20, 2016

Accepted on: Mar 21, 2017

Published on: Mar 22, 2017

Published by: Italian Society for Applied and Industrial Mathemathics

In partnership with: Paradigm Publishing Services

Publication frequency: 1 issue per year

Keywords:

Boundary Integral Equations,

Rarefied Gas Dynamics,

MEMS

Related subjects:

Mathematics,

Numerical and computational mathematics,

Applied mathematics

© 2017 Patrick Fedeli, Attilio Frangi, published by Italian Society for Applied and Industrial Mathemathics
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Volume 8 (2017): Issue 1 (March 2017)