Fabrication of nano-patterns of photoresist by ultraviolet lithography and oxygen plasma
Cheng, E, Tang, Suzhou, Zou, Helin, Zhang, Zhengyan, Wang, Yao
A fast and simple bonding method for low cost microfluidic chip fabrication
Yin, Zhifu, Zou, Helin
Experimental and Numerical Study on PDMS Collapse for Fabrication of Micro/Nanochannels
Yin, Zhifu, Zou, Helin
A New Dry Etching Method with the High Etching Rate for Patterning Cross–Linked SU–8 Thick Films
Han, Jingning, Yin, Zhifu, Zou, Helin, Wang, Wenqiang, Feng, Jianbo