Structural and Optical Properties of Aluminium Nitride Thin Films Fabricated Using Pulsed Laser Deposition and DC Magnetron Sputtering on Various Substrates
Virt, Ihor, Potera, Piotr, Wisz, Grzegorz, Dziedzic, Andrzej, Cieniek, Bogumił, Lopatynskyi, Ivan, Frugynskyi, Marian
Optical properties of AlN layers obtained by magnetron sputtering
Potera, Piotr, Wisz, Grzegorz, Szyller, Łukasz