Influence of modulation frequency on the synthesis of thin films in pulsed magnetron sputtering processes
Strzelecki, G.W., Nowakowska-Langier, K., Chodun, R., Okrasa, S., Wicher, B., Zdunek, K.
Structure of AlN films deposited by magnetron sputtering method
Nowakowska-Langier, K., Chodun, R., Zdunek, K., Minikayev, R., Nietubyc, R.