Closed form Models for Pull-In Voltage of Electrostatically Actuated Cantilever Beams and Comparative Analysis of Cantilevers and Microgripper
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- SENTURIA, S. D.: Microsystems Design, Kluwer Academic, Boston, MA, 2000, pp. 249-259.
- BARKE, E.: Line to Ground Capacitance Calculation for VLSI: A Comparison, IEEE Transactions on ComputerAided DesignNo. 2 (Feb 1988).
- BATRA, R. C.—PORFIRI, M.—SPINELLO, D.: Review of Modeling of Electrostatically Actuated Micromechancial System, J. Smart Mater. Struct.No. 6 (Dec 2007), R23-R21, DOI: 10.1088/0964-1726/16/6/R01.
- CHANG, W. H.: Analytical IC Metal Line Capacitance formulas, IEEE Transactions in Microwave Theory and Techniques (Sep 1976).
- Van Der MEIJS, N. P.—FOKKEMA, J. T.: VLSI Circuit Reconstruction from Mask Topology, IntegrationNo. 2 (Mar 1984), 85-119.
- YUAN, C. P.—TRICK, T. N.: Simple Formulas for the Two and Three Dimensional Capacitances, IEEE Conf. Comput- Aided Design (1984), 263-265.
- ELMASRY, M. I.: Capacitance Calculations in MOSFET VLSI, IEEE Electron Device Letts.No. 1 (Jan 1982), 6-7, DOI: 10.1109/EDL.1982.25454.
- SAKURAI, T.—TAMARU, K.: Simple Formulas for Two- and Three-Dimensional Capacitances, IEEE Trans. Electron DevicesNo. 2 (Feb 1983), 183-185, DOI: 10.1109/TED.1983.21093.
- PALMER, H. B.: The Capacitance of a Parallel-Plate by the SchwartzChristoffel Transformationjour Trans. AIEE.
- CHOWDHURY, S.—AHMADI, M.—MILLER, W. C.: A Closed-Form Model for the Pull-in Voltage of Electrostatically Actuated Cantilever Beams, J. Micromech MicroengNo. 4 (Apr 2005), 756-763.
- OSTERBERG, P. M.: Electrostatically Actuated Micromechanical Test Structures for Material Property Measurements, PhD Dissertation, Massachusetts Institute of Technology, MA, 1995.
- LADABAUM, I.—JIN, X.—SOH, H. T.—KHURIYAKUB, B. T.: Surface Micromachined Capacitive Ultrasonic Transducers, IEEE Transactions on Ultrasonic and Ferro Electronics, Freq. control.(1999), 679-90.
- OSTERBERG, P. M.—SENTURIA, S. D.: M Test: a Test Chip for MEMS Material Property Measurement using Electrostatically Actuated Test Structures, Journal of Micro Electro Mechanical SystemsNo. 2 (June 1997), 107-118.
- TILMANS, H. A. C.—LEGTENBERG, R.: Electrostatically Driven Vacuum-Encapsulated Polysilicon Resonators Part II. Theory and Performance, Sensors and Actuators A PhysicalNo. 1 (Oct 1994,), 67-84, DOI: 10.1016/0924-4247(94)00813-2.
- NEMIROVRSKY, Y.—BOCHOSZA-DEGANI, O.: A Methodology and Model for the Pull-in Parameters of Electrostatic Actuators, Journal of Micro Electro Mechanical SystemsNo. 4 (Dec 2001), 600-615.
- HU, Y. C.: Closed Form Solutions for the Pull-in Voltage of Microcurled Beam Subjected to Electrostatic Loads, J. Micromech. Microeng(Feb 2006), 648-655.
- HU, Y. C.—LEE, G. D.: A Closed Form Solution for the Pull-in Voltage of the Micro Bridgejour Tamkang Journal of Science and Engineering.
- RAMEZAN, A.—ALASTY, A.—AKBARI, J.: Closed Form Solutions of the Pull-in Instability in Nano Cantilevers under Electrostatic and Intermolecular Surface Stress, International Journal of Solids and Structures(July 2007), 4925-4941.
- CHATERJEE, S.—POHIT, G.: A Large Deflection Model for Pull-in Analysis of Electrostatically Actuated Microcantilever Beams, Journal of Sound and Vibration(Jan 2009), 964-986.
- VARONA, J—SAENZ, E—FISCALWOODHOUSE, S.—HAMOUI, A. A.: Design and Fabrication of a Novel Microgripper Based on Electrostatic Actuation, Circuits and Systems, 2009. MWSCAS '09. 52nd IEEE International Midwest Symposium. Aug. 2009.
DOI: https://doi.org/10.2478/v10187-012-0034-6 | Journal eISSN: 1339-309X (formerly 1335-3632) | Journal ISSN: 1335-3632
Language: English
Page range: 242 - 248
Published on: Sep 17, 2012
Published by: Slovak University of Technology in Bratislava
In partnership with: Paradigm Publishing Services
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© 2012 Kalaiarasi Ramakrishnan, Hosimin Srinivasan, published by Slovak University of Technology in Bratislava
This work is licensed under the Creative Commons License.