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Some Aspects of Quantitative Analysis of Ternary Alloys of Group III-Nitrides by Auger Electron Spectroscopy Cover

Some Aspects of Quantitative Analysis of Ternary Alloys of Group III-Nitrides by Auger Electron Spectroscopy

Journal of Electrical Engineering
Volume 62 (2011): Issue 6 (November 2011)
By: Jozef Liday,  Peter Vogrinčič and  Gernod Ecke  
Open Access
|Dec 2011

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DOI: https://doi.org/10.2478/v10187-011-0059-2 | Journal eISSN: 1339-309X | Journal ISSN: 1335-3632
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Language: English
Page range: 367 - 369
Published on: Dec 21, 2011
Published by: Slovak University of Technology in Bratislava
In partnership with: Paradigm Publishing Services
Publication frequency: 6 issues per year
Keywords:
GaN,
AlN,
AlGaN,
AES relative elemental sensitivity factors,
component sputtering yields
Related subjects:
Engineering,
Introductions and overviews,
Engineering, other

© 2011 Jozef Liday, Peter Vogrinčič, Gernod Ecke, published by Slovak University of Technology in Bratislava
This work is licensed under the Creative Commons License.

Volume 62 (2011): Issue 6 (November 2011)