Preparation of ITO films using a spray pyrolysis solution containing an acetylacetone chelating agent

Gao, Yun; Zhao, Gaoyang; Duan, Zongfan; Ren, Yang

doi:10.2478/s13536-013-0159-8

Abstract

Indium tin oxide (ITO) films were deposited on soda-lime glass substrates by the spray pyrolysis method using a spray solution of InCl3·3H2O as a precursor, SnCl4·5H2O as a dopant and acetylacetone (AcAcH) as a chelating agent. The effect of the addition of AcAcH to the spray solution on the surface morphology of the ITO film was investigated. The surface quality of the film prepared from the spray solution with AcAcH was better than that without AcAcH. The ITO film with the thickness of 230 nm, using the spray solution with AcAcH, exhibited the lowest resistivity of 4.75 × 10−4 Ω·cm and higher optical transmittance of 85 %, respectively.

References

[1] Ginley D.S., Handbook of Transparent Conductors, Springer, Germany, 2010. 10.1007/978-1-4419-1638-9
Search in Google Scholar
[2] Guai G.H., Song Q.L., Lu Z.S., Ming C., Surf. Coat. Tech., 205 (2011), 2852. http://dx.doi.org/10.1016/j.surfcoat.2010.10.06210.1016/j.surfcoat.2010.10.062
Search in Google Scholar
[3] Liu J.X., Wu D., Zeng S.G., J. Mater. Process. Tech., 209 (2009), 3943. http://dx.doi.org/10.1016/j.jmatprotec.2008.09.01610.1016/j.jmatprotec.2008.09.016
Search in Google Scholar
[4] Cho H., Yun Y., Ceram. Int., 37 (2011), 615. http://dx.doi.org/10.1016/j.ceramint.2010.09.03310.1016/j.ceramint.2010.09.033
Search in Google Scholar
[5] Moholkar A.V., Pawar S.M., Rajpure K.Y., Ganesan V., Bhosale C.H., J. Alloy. Compd., 464 (2008), 387. http://dx.doi.org/10.1016/j.jallcom.2007.09.13810.1016/j.jallcom.2007.09.138
Search in Google Scholar
[6] Koh S.K., Han Y.G., Lee J.H., Yeo U.J., Cho J.S., Thin Solid Films, 496 (2006), 81. http://dx.doi.org/10.1016/j.tsf.2005.08.25110.1016/j.tsf.2005.08.251
Search in Google Scholar
[7] Maruyama T., Fukui K., J. Appl. Phys., 70 (1991), 3848. http://dx.doi.org/10.1063/1.34918910.1063/1.349189
Search in Google Scholar
[8] Moses Ezhil Raj A. et al., Physica B., 403 (2008), 544. http://dx.doi.org/10.1016/j.physb.2007.09.07610.1016/j.physb.2007.09.076
Search in Google Scholar
[9] Perednis D., Thin Film Deposition by Spray Pyrolysis and the Application in Solid Oxide Fuel Cells, Swiss Federal Institute of Technology, Swiss, 2003.
Search in Google Scholar
[10] Zhi X., Zhao G., Zhu T., Li Y., Surf. Interface Anal., 40 (2008), 67. http://dx.doi.org/10.1002/sia.269310.1002/sia.2693
Search in Google Scholar
[11] Kozuka H., Sol-Gel Science and Technology Processing Characterization and applications-Sol-Gel processing, in: K. NISHIO, T. TSUCHIYA (Eds.), Sol-Gel Processing of Thin Films with Metal Salts, Springer, Germany, 2004, 59.
Search in Google Scholar
[12] Sohn J.R., Lee S.I., J. Ind. Eng. Chem., 3 (1997), 198.
Search in Google Scholar
[13] Manoj P.K., Gopchandran K.G., Koshy P., Vaidyan V.K., B. JOSEPH, Opt. Mater., 28 (2006), 1405. http://dx.doi.org/10.1016/j.optmat.2005.08.01210.1016/j.optmat.2005.08.012
Search in Google Scholar

Preparation of ITO films using a spray pyrolysis solution containing an acetylacetone chelating agent

Abstract

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