Abstract
The paper presents the results of structural examinations and mechanical tests of Cu/Ni multilayers fabricated by the magnetron sputtering method. The investigated multilayers were differentiated by Ni sublayer thickness (1, 3 and 6 nm), while the retaining Cu sublayer thickness was unchanged (2 nm). Measurements demonstrated that the multilayers were strongly textured in the direction of their growth [111], with the thinnest multilayer (Cu/Ni = 2/1) showing a stronger texture. Stronger texturing was associated with greater surface roughness. Multilayers with the largest thickness had higher hardness and Young’s modulus. The properties of Cu/Ni multilayers depended both on the thickness of their sublayers, as well as on their total thickness.