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Structural, morphological, and optical properties of AgxO thin films deposited via obliquely angle deposition Cover

Structural, morphological, and optical properties of AgxO thin films deposited via obliquely angle deposition

Open Access
|Jun 2023

Figures & Tables

Fig. 1.

(A) The schematic diagram of the GLAD technique, and (B) diagram of the self-shadowing effect during the growth of the layer. GLAD, glancing angle deposition
(A) The schematic diagram of the GLAD technique, and (B) diagram of the self-shadowing effect during the growth of the layer. GLAD, glancing angle deposition

Fig. 2.

(A) XRD patterns of AgxO thin films deposited, respectively, at γ=0°, 20°, 40°, 60°, 75°, and 85°annealed at 300°C, and (B) XRD patterns of AgxO thin films in the Bragg angles range 35°–40°. XRD, X-ray diffraction
(A) XRD patterns of AgxO thin films deposited, respectively, at γ=0°, 20°, 40°, 60°, 75°, and 85°annealed at 300°C, and (B) XRD patterns of AgxO thin films in the Bragg angles range 35°–40°. XRD, X-ray diffraction

Fig. 3.

(A) XRD patterns of AgxO thin films deposited, respectively, at γ=0°, 20°, 40°, 60°, 75°, and 85°annealed at 400°C, and (B) XRD patterns of AgxO thin films in the Bragg angles range 35°–40°. XRD, X-ray diffraction
(A) XRD patterns of AgxO thin films deposited, respectively, at γ=0°, 20°, 40°, 60°, 75°, and 85°annealed at 400°C, and (B) XRD patterns of AgxO thin films in the Bragg angles range 35°–40°. XRD, X-ray diffraction

Fig. 4.

Surface morphology of silver thin film before annealing for the incident angle γ=0°
Surface morphology of silver thin film before annealing for the incident angle γ=0°

Fig. 5.

Surface morphologies of silver oxide thin films after annealing at 300°C for the incident angles a=(γ=0°), b= (γ=40°), c=(γ=60°), d=(γ=75°), and e=(γ=85°)
Surface morphologies of silver oxide thin films after annealing at 300°C for the incident angles a=(γ=0°), b= (γ=40°), c=(γ=60°), d=(γ=75°), and e=(γ=85°)

Fig. 6.

Surface morphologies of silver oxide thin films after annealing at 400°C for the incident angles a=(γ=0°), b= (γ=40°), c=(γ=60°), d=(γ=75°), and e=(γ=85°)
Surface morphologies of silver oxide thin films after annealing at 400°C for the incident angles a=(γ=0°), b= (γ=40°), c=(γ=60°), d=(γ=75°), and e=(γ=85°)

Fig. 7.

Cross-section of AgxO thin films deposited at incident angles(A)γ= 60°, (B)γ=75°, and (C)γ=85°
Cross-section of AgxO thin films deposited at incident angles(A)γ= 60°, (B)γ=75°, and (C)γ=85°

Fig. 8.

(A) Transmittance spectra and (B) reflectance spectra of AgxO films deposited, respectively, at γ=0°, 20°, 40°, 60°, 75°, and 85° for the annealing temperature in free air of 300°C, for silver thin films
(A) Transmittance spectra and (B) reflectance spectra of AgxO films deposited, respectively, at γ=0°, 20°, 40°, 60°, 75°, and 85° for the annealing temperature in free air of 300°C, for silver thin films

Fig. 9.

(A) Transmittance spectra and (B) reflectance spectra of AgxO films deposited, respectively, at γ=0°, 20°, 40°, 60°, 75°, and 85° for the annealing temperature in free air of 400°C, for silver thin films
(A) Transmittance spectra and (B) reflectance spectra of AgxO films deposited, respectively, at γ=0°, 20°, 40°, 60°, 75°, and 85° for the annealing temperature in free air of 400°C, for silver thin films

Fig. 10.

Plot of average reflection for AgxO thin films deposited at different deposition angles (γ=0°, 20°, 40°, 60°, 75°, and 85°) annealed at 300°C and 400°C
Plot of average reflection for AgxO thin films deposited at different deposition angles (γ=0°, 20°, 40°, 60°, 75°, and 85°) annealed at 300°C and 400°C

Fig. 11.

The variation of the thickness for the incident angles γ= 40°, 60°, 75°, and 85°for the annealing temperatures (A) 300°C and (B) 400°C
The variation of the thickness for the incident angles γ= 40°, 60°, 75°, and 85°for the annealing temperatures (A) 300°C and (B) 400°C

Fig. 12.

Extinction coefficient spectra of films deposited at incident angles γ=40°, 60°, 75°, and 85°annealed in free air at (A) 300°C and (B) 400°C
Extinction coefficient spectra of films deposited at incident angles γ=40°, 60°, 75°, and 85°annealed in free air at (A) 300°C and (B) 400°C

Fig. 13.

Refractive index spectra of films deposited at incident angles γ=40°, 60°, 75°, and 85°annealed in free air at (A) 300°C and (B) 400°C
Refractive index spectra of films deposited at incident angles γ=40°, 60°, 75°, and 85°annealed in free air at (A) 300°C and (B) 400°C

Fig. 14.

Δn spectra of films deposited at incident angles γ=40 , 60°, 75°, and 85°annealed in free air at (A) 300°C and (B) 400°C
Δn spectra of films deposited at incident angles γ=40 , 60°, 75°, and 85°annealed in free air at (A) 300°C and (B) 400°C

Fig. 15.

The variation of the plane birefringence Δn for AgxO thin films deposited at different deposition angles (γ=0°, 20°, 40°, 60°, 75°, and 85°) for the annealing temperature in free air 300°C, for silver thin films
The variation of the plane birefringence Δn for AgxO thin films deposited at different deposition angles (γ=0°, 20°, 40°, 60°, 75°, and 85°) for the annealing temperature in free air 300°C, for silver thin films

Fig. 16.

Absorption coefficient spectra of films deposited at incident angles γ=40°, 60°, 75°, and 85°annealed in free air at (A) 300°C and (B) 400°C
Absorption coefficient spectra of films deposited at incident angles γ=40°, 60°, 75°, and 85°annealed in free air at (A) 300°C and (B) 400°C

Fig. 17.

Direct band gap energy spectra of films deposited at incident angles γ=40°, 60°, 75°, and 85°annealed in free air at (A) 300°C and (B) 400°C
Direct band gap energy spectra of films deposited at incident angles γ=40°, 60°, 75°, and 85°annealed in free air at (A) 300°C and (B) 400°C

Different phases, Bragg angles, and reticular planes (hkl) of the samples for the incident angles γ=0°, 20°, 40°, 60°, 75°, and 85°and the incident angles γ=0°, 20°, 40°, and 60° for the annealing temperatures 300°C and 400°C, respectively

Annealing temperature (°C)Deposition angle γ (°)Bragg angle 2θ(°)Phases(hkl)
3000038.1Ag(111)
2044.3Ag(200)
4038.1Ag(111)
6038.2Ag2O(200)
7544.3Ag(200)
8532.2Ag2O(111)
38.1Ag(111)
38.2Ag2O(200)
44.3Ag(200)
32.2Ag2O(111)
38.1Ag(111)
38.2Ag2O(200)
44.3Ag(200)
32.2Ag2O(111)
38.2Ag2O(200)
44.4Ag(200)
32.2Ag2O(111)
38.2Ag2O(200)
4000038.1Ag(111)
2044.4Ag(200)
4038.1Ag(111)
6038.2Ag2O(200)
44.3Ag(200)
38.1Ag(111)
38.2Ag2O(200)
44.3Ag(200)
38.1Ag(111)
38.2Ag2O(200)
44.3Ag(200)

Structural data of nanocolumnar silver oxide thin films for the incident angles γ=0°, 20°, 40°, 60°, 75°, and 85°, and with the annealing temperature at 300°C and 400°C

Annealing temperature (°C)Deposition angleγ(°)Crystallite size (nm)Strain ε (×10−3)Dislocation density (δ)(×10−3) (nm−2)
30000362.950.77
20551.920.33
40512.090.38
60541.950.34
75263.971.47
85273.901.37
40000372.810.73
20571.960.30
40512.090.38
60551.970.32
75
85
DOI: https://doi.org/10.2478/msp-2023-0002 | Journal eISSN: 2083-134X | Journal ISSN: 2083-1331
Language: English
Page range: 27 - 41
Submitted on: Oct 17, 2022
Accepted on: Jan 31, 2023
Published on: Jun 12, 2023
Published by: Sciendo
In partnership with: Paradigm Publishing Services
Publication frequency: 4 times per year

© 2023 H. Ben Soltane, F. Chaffar Akkari, B. Gallas, M. Kanzari, published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.