Investigation of Silicon Carbide Polytypes by Raman Spectroscopy
By: G. Chikvaidze, N. Mironova-Ulmane, A. Plaude and O. Sergeev
Abstract
Polytypes of colourless and coloured single crystals of silicon carbide (SiC) grown on SiC substrates by chemical vapour deposition are studied using Raman spectroscopy supplemented by scanning electron microscopy (SEM) and X-ray diffraction (XRD) analyses. The SEM analysis of the defect stacking faults, inclusions of defects and their distribution has shown that they correlate with the peak positions of the obtained Raman spectra and with the XRD data on the crystal structure
Language: English
Page range: 51 - 57
Published on: Jul 16, 2014
Published by: Institute of Physical Energetics
In partnership with: Paradigm Publishing Services
Publication frequency: 6 issues per year
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© 2014 G. Chikvaidze, N. Mironova-Ulmane, A. Plaude, O. Sergeev, published by Institute of Physical Energetics
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.