Preparation of laser induced periodic surface structures for gas sensing thin films and gas sensing verification of a NiO based sensor structure
References
- Z. Chen, Z. Chen, Z. Song, W. Ye, and Z. Fan, “Smart gas sensor arrays powered by artificial intelligence,” Journal of Semiconductors, vol. 40, no. 11, p. 111601, 2019. doi:10.1088/1674-4926/40/11/111601
- M. Penza and G. Cassano, “Chemometric characterization of Italian wines by thin-film multisensors array and artificial neural networks,” Food Chemistry, vol. 86, no. 2, pp. 283–296, 2004. doi:10.1016/j.foodchem.2003.09.027
- S. Sironi and R. Del Rosso, “Smart gas sensor arrays powered by artificial intelligence,” Sensors, vol. 14, no. 11, pp. 19979–20007, 2014. doi:10.3390/s141119979
- M. Hakim et al., “Volatile organic compounds of lung cancer and possible biochemical pathways,” Chemical Reviews, vol. 112, no. 11, pp. 5949–5966, 2012. doi:10.1021/cr300174a
- J. Chen et al., “Ultra-Low-Power smart electronic nose system based on three-dimensional tin oxide nanotube arrays,” ACS Nano, vol. 12, no. 6, pp. 6079–6088, 2018. doi:10.1021/acsnano.8b02371
- H. J. Park et al., “Highly flexible, Mechanically stable, and sensitive NO2 gas sensors based on reduced graphene oxide nano-fibrous mesh fabric for flexible electronics,” Sensors and Atuators B: Chemical, vol. 257, pp. 846–852, 2018. doi:10.1016/j.snb.2017.11.032
- D. Yan et al., “Electrochemical synthesis and the gas-sensing properties of the Cu2O nanofilms/porous silicon hybrid structure,” Sensors and Actuators B: Chemical, vol. 223, pp. 626–633, 2016. doi:10.1016/j.snb.2015.09.080
- M. Leber et al., “Different methods to alter surface morphology of high aspect ratio structures,” Applied Surface Science, vol. 365, pp. 180–190, 2016. doi:10.1016/j.apsusc.2016.01.008
- M. Stubenrauch et al., “Black silicon – new functionalities in microsystems,” Journal of Micromechanics and Microengineering, vol. 16, no. 6, 2006. doi:10.1088/0960-1317/16/6/s13
- J. Bonse, “Quo vadis LIPSS? – recent and future trends on laser-induced periodic surface structures,” Nanomaterials, vol. 10, no. 10, p. 1950, 2020. doi:10.3390/nano10101950
- I. Hotovy, L. Spiess, M. Predanocy, V. Rehacek, and J. Racko, “Sputtered nanocrystalline NiO thin films for very low ethanol detection,” Vacuum, vol. 107, pp. 129–131, 2014. doi:10.1016/j.vacuum.2014.04.012
- I. Hotovy et al., “Preparation and gas-sensing properties of very thin sputtered NiO films,” Journal of Electrical Engineering, vol. 72, no. 1, pp. 61–65, 2021. doi:10.2478/jee-2021-0009
Language: English
Page range: 24 - 28
Submitted on: Dec 1, 2023
Published on: Feb 10, 2024
Published by: Slovak University of Technology in Bratislava
In partnership with: Paradigm Publishing Services
Publication frequency: 6 issues per year
Related subjects:
© 2024 Ivan Hotovy, Johann Zehetner, Vlastimil Rehacek, Miroslav Mikolasek, Ivan Kostic, Stanislava Serecunova, Dana Seyringer, Fadi Dohnal, published by Slovak University of Technology in Bratislava
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.