Abstract
In this paper we present the utilization of capacitance and current-voltage diagnostic techniques to analyse silicon heterojunction solar cell structures properties, particularly focused on the inspection of the amorphous emitter and amorphous silicon/crystalline silicon hetero-interface. The capacitance characterization of investigated samples have revealed the need for improvement of the a-Si:H/c-Si heterointerface quality as a main direction to obtain superior output performance of heterojunction cells. In addition, current-voltage characterization emphasized importance for enhancement of the light management in the structure. The obtained results demonstrate that electrical and capacitance diagnostic techniques can represents important diagnostic tools in the process of optimization of solar cells.