References
- Hu, S.C., Chuah, Y.K., 2003. Power consumption of semiconductor fabs in Taiwan. Energy 28, 895–907, DOI: 10.1016/S0360-5442(03)00008-2
- Kapjor, A., Hužvár, J. Greššák, T., 2012. Vzduchotechnika 1. Žilina: EDIS. ISBN 978-80-554-05839-1.
- Khoo, C.Y., Lee, C.C., Hu, S.C., 2012. An experimental study on the influences of air change rate and free area ratio of raised-floor on cleanroom particle concentrations. Build Environ 48, 84–88, DOI: 10.1016/J.BUILDENV.2011.09.001
- Kircher, K., Shi, X., Patil, S., Zhang, K.M., 2010. Cleanroom energy efficiency strategies: Modeling and simulation. Energy Build 42, 282–289, DOI: 10.1016/J.ENBUILD.2009.09.004
- Mičko, P., Hečko, D., Kapjor, A., Nosek, R., Kolková, Z., Hrabovský, P., Kantová, N.Č., 2022. Impact of the Speed of Airflow in a Cleanroom on the Degree of Air Pollution. Applied Sciences 2022, Vol. 12, Page 2466 12, 2466, DOI: 10.3390/APP12052466
- STN EN ISO 14644-1 (12 5301) 1.5.2016 | Technická norma | NORMSERVIS s.r.o. [WWW Document], n.d. URL https://eshop.normservis.sk/norma/stneniso-14644-1-1.5.2016.html (accessed 11.20.24).
- Tsao, J.M., Hu, S.C., Chan, D.Y.L., Hsu, R.T.C., Lee, J.C.C., 2008. Saving energy in the makeup air unit (MAU) for semiconductor clean rooms in subtropical areas. Energy Build 40, 1387–1393, DOI: 10.1016/J.ENBUILD.2007.12.005