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Study on the suitability of ZnO thin film for dynamic pressure sensing application

International Journal on Smart Sensing and Intelligent Systems
Volume 13 (2020): Issue 1 (January 2020)
By:
Open Access
|Jan 2020

Figures & Tables

Figure 1:

Schematic of ZnO thin film-based sensor packaged for dynamic pressure sensing application.
Schematic of ZnO thin film-based sensor packaged for dynamic pressure sensing application.

Figure 2:

Experimental test setup used for the characterization of dynamic pressure sensor.
Experimental test setup used for the characterization of dynamic pressure sensor.

Figure 3:

XRD pattern of ZnO thin film deposited for different durations.
XRD pattern of ZnO thin film deposited for different durations.

Figure 4:

FE-SEM image: surface morphology of the ZnO thin films for deposition durations of (A) 15 min, (B) 30 min, (C) 45 min, and (D) 60 min.
FE-SEM image: surface morphology of the ZnO thin films for deposition durations of (A) 15 min, (B) 30 min, (C) 45 min, and (D) 60 min.

Figure 5:

FE-SEM image: cross-section of the ZnO thin films for deposition durations of (A) 15 min, (B) 30 min, (C) 45 min, and (D) 60 min.
FE-SEM image: cross-section of the ZnO thin films for deposition durations of (A) 15 min, (B) 30 min, (C) 45 min, and (D) 60 min.

Figure 6:

Variation of film thickness with deposition duration.
Variation of film thickness with deposition duration.

Figure 7:

EDS spectra of the thin films for the deposition durations of (A) 15 min, (B) 30 min, (C) 45 min, and (D) 60 min.
EDS spectra of the thin films for the deposition durations of (A) 15 min, (B) 30 min, (C) 45 min, and (D) 60 min.

Figure 8:

(A) EDS result – composition of ZnO film in weight %, and (B) EDS result – composition of ZnO film in atomic %.
(A) EDS result – composition of ZnO film in weight %, and (B) EDS result – composition of ZnO film in atomic %.

Figure 9:

Response of ZnO thin film sensor (Sensor 4) and reference sensor to shockwave (14.24 bar pressure).
Response of ZnO thin film sensor (Sensor 4) and reference sensor to shockwave (14.24 bar pressure).

Figure 10:

Output of ZnO thin film sensors vs shockwave pressure.
Output of ZnO thin film sensors vs shockwave pressure.

Figure 11:

Sensitivity of ZnO thin film dynamic pressure sensors.
Sensitivity of ZnO thin film dynamic pressure sensors.

Structural details of ZnO thin film derived from XRD_

Sl. No.Deposition duration (min)2θ (Deg)FWHM (Deg)Average grain size (nm)
11533.9500.79610.905
23033.8900.68412.694
34533.8900.60114.435
46034.0140.51716.777

Sputtering parameters used for deposition of ZnO thin film_

Target – substrate distance28 cm
Substrate temperature24 ± 2oC
RF power120 W
Ar-O2 ratio17.1–3.1 Sccm (85%–15%)
Ultimate pressure5 × 10−6 mbar
Working pressure1.4 × 10−2 mbar
Deposition time15, 30, 45, and 60 min
DOI: https://doi.org/10.21307/ijssis-2020-002 | Journal eISSN: 1178-5608
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Language: English
Page range: 1 - 9
Submitted on: Dec 17, 2018
Published on: Jan 29, 2020
Published by: Professor Subhas Chandra Mukhopadhyay
In partnership with: Paradigm Publishing Services
Publication frequency: 1 issue per year
Keywords:
ZnO,
Thin film,
Sputtering,
Dynamic pressure sensor,
Shock tube.
Related subjects:
Engineering,
Introductions and overviews,
Engineering, other

© 2020 Suma M. N., Venkateswarlu Gaddam, M. V. N. Prasad, M. M. Nayak, K. Rajanna, published by Professor Subhas Chandra Mukhopadhyay
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

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