Authors
S.I. Hintschich
susanne.hintschich@ipms.fraunhofer.de
Institute for Photonic Microsystems IPMS Fraunhofer Gesellschaft, Dresden, Germany
T. Pügner
Institute for Photonic Microsystems IPMS Fraunhofer Gesellschaft, Dresden, Germany
J. Knobbe
Institute for Photonic Microsystems IPMS Fraunhofer Gesellschaft, Dresden, Germany
J. Schröder
Institute for Photonic Microsystems IPMS Fraunhofer Gesellschaft, Dresden, Germany
P. Reinig
Institute for Photonic Microsystems IPMS Fraunhofer Gesellschaft, Dresden, Germany
H. Grüger
Institute for Photonic Microsystems IPMS Fraunhofer Gesellschaft, Dresden, Germany
H. Schenk
Institute for Photonic Microsystems IPMS Fraunhofer Gesellschaft, Dresden, Germany