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Fabrication and Characterization of High Performance Micro Impedance Inclinometer Cover

Fabrication and Characterization of High Performance Micro Impedance Inclinometer

By: Chia-Yen Lee and  Lung-Ming Fu  
Open Access
|Feb 2020

References

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  6. S. Billat, H. Glosch, M. Kunze, F. Hedrich, J. Frech, J. Auber, H. Sandmaier, W. Wimmer, W. Lang, “Micromachined inclinometer withhigh sensitivity and very good stability,” Sens. Actuat. A: Phys. vol. 97/98, pp. 125-130, 2002.
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Language: English
Page range: 1 - 5
Published on: Feb 15, 2020
In partnership with: Paradigm Publishing Services
Publication frequency: 1 issue per year

© 2020 Chia-Yen Lee, Lung-Ming Fu, published by Professor Subhas Chandra Mukhopadhyay
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.