Fabrication and Characterization of High Performance Micro Impedance Inclinometer
By: Chia-Yen Lee and Lung-Ming Fu
References
- C. H. Lin, S. M. Kuo, “Micro-impedance inclinometer with wide-angle measuring capability and no damping effect,” Sens. Actuat. A: Phys. vol. 143, pp. 113-119, 2008.
- U. Mescheder, S. Majer, “Micromechanical inclinometer,” Sens. Actuat. A: Phys. vol. 60, pp. 134-138, 1997.
- R. A. Yotter, R. R. Baxter, S. Ohno, S. D. Hawley, D. M. Wilson, “On a micromachined fluidic inclinometer,” Transducers 2003, USA, pp.12791282, June, 2003..
- I. S. Kang, H. Jung, C. J. Kim, B. J. Kwon, W. J. Kim, S. Y. Choi, J. H. Lee, J. K. Shin, S. H. Kong, “Design and fabrication of a micro electro mechanical systems-based electrolytic tilt sensors,” Jpn. J. Appl. Phys., vol. 45, pp.5626-5630, 2006.
- A. Giani, F. Mailly, M. Al Khalfioui, A. Foucaran, A. Boyer, “Micromachined thermal inclinometer based on flash evaporqted Bi0.5Sb1.5Te3(p)/Bi2Se0.3Te2.7(n) thermocouples,” Mater. Sci. Eng. B:Solid vol. 107, pp. 94-98, 2004.
- S. Billat, H. Glosch, M. Kunze, F. Hedrich, J. Frech, J. Auber, H. Sandmaier, W. Wimmer, W. Lang, “Micromachined inclinometer withhigh sensitivity and very good stability,” Sens. Actuat. A: Phys. vol. 97/98, pp. 125-130, 2002.
- Y. Zhao, J. Yang, B. J. Peng, S. Y. Yang, “Experimental research on a novel fiber-optic cantilever-type inclinometer,” Opt. Laser Technol. Vol. 37, pp. 555-559, 2005.
DOI: https://doi.org/10.21307/ijssis-2019-021 | Journal eISSN: 1178-5608
Language: English
Page range: 1 - 5
Published on: Feb 15, 2020
Published by: Macquarie University, Australia
In partnership with: Paradigm Publishing Services
Publication frequency: 1 issue per year
Keywords:
Related subjects:
© 2020 Chia-Yen Lee, Lung-Ming Fu, published by Macquarie University, Australia
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.