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Method of Optimal Measurement Strategy for Ultra-High-Precision Machine in Roundness Nanometrology Cover

Method of Optimal Measurement Strategy for Ultra-High-Precision Machine in Roundness Nanometrology

International Journal on Smart Sensing and Intelligent Systems
Volume 8 (2015): Issue 2 (January 2015)
By:   
Open Access
|Jun 2015
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DOI: https://doi.org/10.21307/ijssis-2017-788 | Journal eISSN: 1178-5608
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Language: English
Page range: 896 - 920
Submitted on: Nov 29, 2014
Accepted on: Mar 26, 2015
Published on: Jun 1, 2015
Published by: Macquarie University, Australia
In partnership with: Paradigm Publishing Services
Publication frequency: 1 issue per year
Keywords:
Nanometrology,
Talyrond instrument,
roundness,
reference algorithms,
software fitting filters,
uncertainty and evaluation method
Related subjects:
Engineering,
Introductions and overviews,
Engineering, other

© 2015 Salah H. R. Ali, published by Macquarie University, Australia
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Volume 8 (2015): Issue 2 (January 2015)
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