Have a personal or library account? Click to login

L-Shaped Cantilever Parallel - Plate MEMS Accelerometer Design Parameters using A Gravitational Search Algorithm

Open Access
|Mar 2015

References

  1. A. Zia, M.A.S Rahman, S.C. Mukhopadhyay, I. H. Al-Bahadly, P. L. Yu, C. Gooneratne, J. Kosel and T.S. Liao, MEMS Based Impedimetric Sensing of Phthalates, Proceedings of IEEE I2MTC 2013 conference, IEEE Catalog number CFP13IMT-CDR, ISBN 978-1-4673-4622-1, May 6-9, 2013, Minneapolis, USA, pp. 855-860.10.1109/I2MTC.2013.6555536
  2. A. I. Zia, S. C. Mukhopadhyay, P.L. Yu, I.H. Al-Bahadly, C. P. Gooneratne, J. Kosel, “Post Annealing Performance Evaluation of Printable Interdigital Capacitive Sensors by Principal Component Analysis”, IEEE Sensors Journal, 2014, http://dx.doi.org/10.1109/JSEN.2014.2355224.10.1109/JSEN.2014.2355224
  3. A. Sundaram, M. Maddela, R. Ramadoss, and L. Feldner, MEMS-Based electronically steerable antenna array fabricated using PCB technology, Microelectromechanical Systems, Journal of, vol. 17, no. 2, pp. 356-362, Apr. 2008.10.1109/JMEMS.2008.916291
  4. C-H. Han, D-H. Choi, and J-B. Yoon, Parallel-plate MEMS variable capacitor with superior linearity and large tuning ratio using a levering structure,” Microelectromechanical Systems, Journal of, vol. 20, no. 6, pp. 1345-1354, Dec. 2011.
  5. M. Kraft, C. Lewis, T. Hesketh, and S. Szymkowiak, A novel micromachined accelerometer capacitive interface, Sensors and Actuators A: Physical, vol. 68, no. 13, pp. 466-473, Jun. 1998.10.1016/S0924-4247(98)00064-8
  6. Y. Fenglin, G. Shiqiao, Z. Jie, L. Haipeng, N. Shaohua, J. Lei , The vibration and measurement of driving mode of the two-stage decoupled micro-machined gyroscope, Int. J. Smart Sens. Intell. Syst. 6 (2013) 1599-1616.
  7. N. El-Bendary, Q. Tan, F. C. Pivot, A. Lam, Fall detection and prevention for the elderly: a review of trends and challenges, Int. J. Smart Sens. Intell. Syst. 6 (2013) 1230-1266.
  8. S. J. Kim, G. Flowers, C. Chen, and R. Dean, \Active vibration control and isolation for micromachined devices,” in ASME 2008 Conference on Smart Materials, Adaptive Structures and Intelligent Systems, Jan. 2008, pp. 657-664.10.1115/SMASIS2008-423
  9. Ding W., (2013), MEMS pressure sensor, Market & technology report, Yole Développement.
  10. Jeff Perkins, MEMS Everywhere: Sensing the world around you, and more Semicon West, Yole Developpement, 2012 available at http://www.semiconwest.org/sites/ semiconwest.org/files/docs/.
  11. L. M. Roylance and J. B. Angell, A Batch-Fabricated Silicon Accelerometer, IEEE Trans. Elec. Dev., ED-26, 1911 (1979).10.1109/T-ED.1979.19795
  12. Trolier Mckinstry and P. Muralt, Thin film piezoelectrics for MEMS, J. Electroceramics, vol. 12, no. 1-2, pp. 7–17, 2004.10.1023/B:JECR.0000033998.72845.51
  13. T. Berther, G.H. Gautschi, J. Kubler, Capacitive accelerometers for static and low-frequency measurements, Sound and Vibration 30 (6)(1996) 28-30.
  14. H. Chen, S. Shen, M. Bao, Over-range capacity of a piezoresistive micro accelerometer, Sens. Actuators 58 (3) (1997) 197-201.10.1016/S0924-4247(97)01393-9
  15. G. H. Gautschi, Piezoelectric Sensorics. New York: Springer, 2002.10.1007/978-3-662-04732-3
  16. Biter Boga, et al., Modeling of a capacitive Σ-Δ mems accelerometer system Including the noise components and Verification with test results, pp. 821 – 824, doi 10.1109/MEMSYS.2009.4805509-2009 ©IEEE.
  17. Yoshida, K.; Matsumoto, Y.; Ishida, M.; Okada, K. High-Sensitive Three Axis SOI Capacitive Accelerometer Using Dicing Method. Proceedings of Technical Digest of the 16th Sensor Symposium, Toyohashi, Japan, 2–3 June 1998; pp. 25–28.
  18. Vincas Benevicius et al., Identification of Capacitive MEMS Accelerometer Structure Parameters for Human Body Dynamics Measurements, Sensors 2013, 13, 11184-11195; doi:10.3390/s13091118410.3390/s130911184382132423974151
  19. D.Ozevin et al., Resonant capacitive MEMS acoustic emission transducers, Smart Mater. Struct. 15 (2006) 1863–1871, doi:10.1088/0964-1726/15/6/041.10.1088/0964-1726/15/6/041
  20. H. Helvajian, ed, “Microengineering Aerospace Systems”, The Aerospace Press, 199910.2514/4.989032
  21. S. Cass, “MEMS in Space”, IEEE Spectrum, p.56, July 200110.1109/6.931884
  22. Robert Osiander, M. Ann Garrison Darrin, John L. Champion (Editors), “MEMS and Microstructures in Aerospace Applications”, CRC (2005) 400 pages, Chapter 11, Micropropulsion technologies, J. Schein, pp. 229.
  23. Hoon Sohn et al., A Review of Structural Health Monitoring Literature: 1996–2001, Los Alamos National Laboratory Report, LA-13976-MS, 2004.
  24. T. Paul, J. Singh, M.M. Nayak, K. Rajanna, M.S. Kumar, Design and optimization of bulk micromachinaded accelerometer for space applications, Int. J. Smart Sens. Intell. Syst. 1 (2008) 1019-1030.
  25. J.S. Botero V, W. Hernández, E. Fernández, Orientation of a triaxial accelerometer using a homogeneous transformation matrix and kalman filters, Int. J. Smart Sens. Intell. Syst. 7 (2014) 1631-1646.
  26. R.R. Craig, A.J. Kurdila, Fundamentals of Structural Dynamics [M], Wiley.com, 2006.
  27. Ki Bang Lee, Principles of Microelectromechanical Systems, John Wiley & Sons, Inc., 2011.
  28. Esmat Rashedi, Hossein Nezamabadi, Saeid Saryazdi. GSA: A Gravitational Search Algorithm. Department of Electrical Engineering, Shahid Bahonar University of Kerman, P.O. Box 76169-133, Kerman, Iran. Information Sciences 179 (2009) 2232–2248.
  29. M. Ghalambaz, A.R. Noghrehabadi, M.A. Behrang, E. Assareh, A. Ghanbarzadeh, N.Hedayat, A Hybrid Neural Network and Gravitational Search Algorithm (HNNGSA) Method to Solve well known Wessinger’s Equation, World Academy of Science, Engineering and Technology 73 2011.
  30. Serhat Duman, Yusuf Sonmez, Yusuf Sonmez, Application of Gravitational Search Algorithm for Optimal Reactive Power Dispatch Problem, pp. 519 – 523, 987-1-61284-922-5/11/$26.00©2011 IEEE.
  31. Mohammad Khajehzadeh and Mahdiyeh Eslami, Gravitational search algorithm for optimization of retaining structures, Indian Journal of Science and Technology, pp.1821-1827, Vol. 5 No. 1 (Jan 2012) ISSN: 0974- 6846.
  32. A.Chatterjee and G. K. Mahanti, Comparative performance of gravitational search algorithm and modified particle swarm optimization algorithm for synthesis of thinned scanned concentric ring array antenna, Progress in Electromagnetics Research B, Vol. 25, 331-348, 2010.10.2528/PIERB10080405
Language: English
Page range: 65 - 89
Submitted on: Nov 12, 2014
Accepted on: Jan 7, 2015
Published on: Mar 1, 2015
Published by: Professor Subhas Chandra Mukhopadhyay
In partnership with: Paradigm Publishing Services
Publication frequency: 1 times per year

© 2015 Souad Oukil, Abdelmadjid Boudjemai, Nabil Boughanmi, published by Professor Subhas Chandra Mukhopadhyay
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.