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Design and Optimization of Bulk Micromachined Accelerometer for Space Applications Cover

Design and Optimization of Bulk Micromachined Accelerometer for Space Applications

Open Access
|Nov 2017

References

  1. [1]Elwenspoek, “Mechanical Microsensors,” Springer, 2001
  2. [2]Gad-El-Hak & Mohamed, “MEMS Hand Book,”CRC Press, Boca raton, 2002.
  3. [3]Thampi Paul P, Vijin Jenius S and Sasikumar M, “Characterization and Nonlinearity compensation of Capacitive sensing MEMS accelerometer for launch vehcle applications,” in Proceedings of the National Society for Insturmentation of ISOI (NSI-30), 2005, pp. 417-421.
  4. [4]Hsu & Tai-Ran, “MEMS and Microsystems-Design and Manufacture,” Tata McGraw-Hill, New Delhi, 2002
  5. [5]Thampi Paul, Roy Paul V and Sasikumar M, “Design and Analysis of High performance differential capacitance readout circuit for Navigational grade MEMS accelerometer,” in Proceedings of the National Society for Instrumentation of ISOI (NSI-30), 2005, pp. 410-416.
  6. [6]Fraden, “Hand Book of Modern Sensors-Physics, Design and Application,” Springer, New York 2004
Language: English
Page range: 1019 - 1030
Published on: Nov 2, 2017
In partnership with: Paradigm Publishing Services
Publication frequency: 1 issue per year

© 2017 Thampi Paul, Jaspreet Singh, M. M. Nayak, K. Rajanna, M. Sasi Kumar, published by Professor Subhas Chandra Mukhopadhyay
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.