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Non-self-sustained discharge with hollow anode for plasma-based surface treatment Cover

Non-self-sustained discharge with hollow anode for plasma-based surface treatment

Nukleonika
Volume 61 (2016): Issue 2 (June 2016)
By: Ivan O. Misiruk,  Oleksandr I. Timoshenko,  Valeriy S. Taran and  Igor E. Garkusha  
Open Access
|Jun 2016

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DOI: https://doi.org/10.1515/nuka-2016-0033 | Journal eISSN: 1508-5791 | Journal ISSN: 0029-5922
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Language: English
Page range: 195 - 199
Submitted on: Sep 30, 2015
|
Accepted on: Nov 27, 2015
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Published on: Jun 15, 2016
Published by: Institute of Nuclear Chemistry and Technology
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year
Keywords:
diffusion saturation,
film deposition,
hollow anode,
ion etching,
ion pumping,
non-self-sustained glow discharge
Related subjects:
Chemistry,
Nuclear chemistry,
Physics,
Astronomy and astrophysics,
Physics, other

© 2016 Ivan O. Misiruk, Oleksandr I. Timoshenko, Valeriy S. Taran, Igor E. Garkusha, published by Institute of Nuclear Chemistry and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

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