
Fig. 1
Schematic illustration of the PVD chamber.

Fig. 2
Two-step synthesis of polyimide.

Fig. 3
FT-IR spectra of PMDA-PDA obtained at different imidization temperatures.

Fig. 4
3-D AFM images of PI thin films obtained at imidization temperatures of (a) 150, (b) 200 and (c) 250 °C.

Fig. 5
2-D AFM images of PI thin films obtained at imidization temperatures of (a) 150, (b) 200 and (c) 250 °C.

Fig. 6
TGA curves for PI thin films obtained at imidization temperatures of (a) 150, (b) 200 and (c) 250 °C.