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Mechanical and structural properties of titanium dioxide deposited by innovative magnetron sputtering process Cover

Mechanical and structural properties of titanium dioxide deposited by innovative magnetron sputtering process

Materials Science-Poland
Volume 33 (2015): Issue 3 (September 2015)
By: Damian Wojcieszak,  Michał Mazur,  Joanna Indyka,  Aleksandra Jurkowska,  Małgorzata Kalisz,  Piotr Domanowski,  Danuta Kaczmarek and  Jarosław Domaradzki  
Open Access
|Aug 2016

References

  1. [1] WILLEY R., Practical production of thin films, Vol. 1, Willey Optical, Consultants, Charleviox, 2008.
    Search in Google Scholar
  2. [2] YANG Y.-C., CHANG C.-T., HSIAO Y.-C., LEE J.-W., LOU B.-S., Surf. Coat. Tech., 259 (2014), 219.10.1016/j.surfcoat.2014.05.028
    Search in Google Scholar
  3. [3] LIN J., MOORE J.J., SPROUL W.D., MISHRA B., WUA Z., WANG J., Surf. Coat. Tech., 204 (2010), 2230.10.1016/j.surfcoat.2009.12.013
    Search in Google Scholar
  4. [4] HSIAO Y.-C., LEE J.-W., YANG Y.-C., LOU B.-S., Thin Solid Films, 549 (2013), 281.10.1016/j.tsf.2013.08.059
    Search in Google Scholar
  5. [5] KACZMAREK D., DOMARADZKI J., WOJCIESZAK D., PROCIOW E., MAZUR M., PLACIDO F., LAPP S., J. Nano Res.-Sw., 18 - 19 (2012), 195.10.4028/www.scientific.net/JNanoR.18-19.195
    Search in Google Scholar
  6. [6] MAZUR M., SIERADZKA K., KACZMAREK D., DOMARADZKI J., WOJCIESZAK D., DOMANOWSKI P., PROCIOW E., Mater. Sci.-Poland, 31 (3) (2013), 434.10.2478/s13536-013-0122-8
    Search in Google Scholar
  7. [7] DOMARADZKI J., KACZMAREK D., PROCIOW E.L., BORKOWSKA A., SCHMEISSER D., BEUCKERT G., Thin Solid Films, 513 (1 - 2) 2006, 269.10.1016/j.tsf.2006.01.049
    Search in Google Scholar
  8. [8] KACZMAREK D., PROCIOW E.L., DOMARADZKI J., BORKOWSKA A., MIELCAREK W., WOJCIESZAK D., Mater. Sci.-Poland, 26 (1) (2008), 113.
    Search in Google Scholar
  9. [9] PAMU D., GHANASHYAM M., RAJU K.C., BHATNAGAR A.K., Solid State Commun., 135 (1 - 2) (2005), 7.10.1016/j.ssc.2005.04.003
    Search in Google Scholar
  10. [10] GAO F.M., GAO L.H., J. Superhard Mater.+, 32 (3) (2010), 148.10.3103/S1063457610030020
    Search in Google Scholar
  11. [11] KULIKOVSKY V., CTVRTLIK R., VORLICEK V., FILIP J., BOHAC P., JASTRABIK L., Thin Solid Films, 542 (2013), 91.10.1016/j.tsf.2013.06.070
    Search in Google Scholar
  12. [12] L¨OBL P., HUPPERTZ M., MERGEL D., Thin Solid Films, 251 (1994), 72.10.1016/0040-6090(94)90843-5
    Search in Google Scholar
  13. [13] MODES T., SCHEFFEL B., METZNER C., ZYWITZKI O., REINHOLD T.E., Surf. Coat. Tech., 200 (2005), 306.10.1016/j.surfcoat.2005.02.080
    Search in Google Scholar
  14. [14] OKIMURA K., SHIBATA A., MAEDA N., TACHIBANA K., NOGUCHI Y., TSUCHIDA K., Jpn. J. Appl. Phys., 43 (1995) 4950.10.1143/JJAP.34.4950
    Search in Google Scholar
  15. [15] GU G.-R., LI Y.-A., TAO Y.-C., HE Z., LI J.-J., YIN H., LI W.-Q., ZHAO Y.-N., Vacuum, 71 (2003), 487.10.1016/S0042-207X(03)00048-4
    Search in Google Scholar
  16. [16] ZEMAN P., TAKABAYASHI S., Surf. Coat. Tech., 153 (2002), 93.10.1016/S0257-8972(01)01553-5
    Search in Google Scholar
  17. [17] JOUANNY I., LABDI S., AUBERT P., BUSCEMA C., MACIEJAK O., BERGER M.-H., GUIPONT V., JEANDIN M., Thin Solid Films, 518 (2010), 3212.10.1016/j.tsf.2009.09.046
    Search in Google Scholar
  18. [18] ZYWITZKI O., MODES T., SAHM H., FRACH P., GOEDICKE K., GL¨OSS D., Surf. Coat. Tech., 180 - 181 (2004), 538.10.1016/j.surfcoat.2003.10.115
    Search in Google Scholar
  19. [19] KONSTANTINIDIS S., DAUCHOT J.P., HECQ M., Thin Solid Films, 515 (2006), 1182.10.1016/j.tsf.2006.07.089
    Search in Google Scholar
  20. [20] STRANAK V., QUAAS M., WULFF H., HUBICKA Z., WREHDE S., TICHY M., HIPPLER R., J. Phys. D Appl. Phys., 41 (2008), 055202.10.1088/0022-3727/41/5/055202
    Search in Google Scholar
  21. [21] BENDAVID A., MARTIN P.J., TAKIKAWA H., Thin Solid Films, 360 (2000), 241.10.1016/S0040-6090(99)00937-2
    Search in Google Scholar
  22. [22] SUDA Y., KAWASAKI H., UEDA T., OHSHIMA T., Thin Solid Films, 453 - 454 (2004), 162.10.1016/j.tsf.2003.11.185
    Search in Google Scholar
  23. [23] CHUANG L.-C., LUO C.-H., YANG S., Appl. Surf. Sci., 258 (2011), 297.10.1016/j.apsusc.2011.08.055
    Search in Google Scholar
  24. [24] DUYAR O., PLACIDO F., DURUSOY H.Z., J. Phys. D Appl. Phys., 41 (2008), 095307.10.1088/0022-3727/41/9/095307
    Search in Google Scholar
  25. [25] GAO F., Phys. Rev. B, 73 (2006), 132104.10.1103/PhysRevB.73.132104
    Search in Google Scholar
  26. [26] LIANG Y., ZHANG B., ZHAO J., Phys. Rev. B, 77 (2008), 094126.10.1103/PhysRevE.77.05660218643181
    Search in Google Scholar
  27. [27] MAYO M.J., SIEGEL R.W., NARAYANASAMY A., NIX W.D., J. Mater. Res., 5 (5) (1990), 1073.10.1557/JMR.1990.1073
    Search in Google Scholar
  28. [28] SCHMIDT-STEIN F., THIEMANN S., BERGER S., HAHN R., SCHMUKI P., Acta Mater., 58 (2010), 6317.10.1016/j.actamat.2010.07.053
    Search in Google Scholar
  29. [29] JUNG H., PARK C., LEE J., PARKY. S., Mater. Res. Bull., 58 (2014), 44.
    Search in Google Scholar
  30. [30] JIMENEZ PIQUE E., GONZALEZ-GARCIA L., RICO V.J., GONZALEZ-ELIPE A.R., Thin Solid Films, 550 (2014), 444.10.1016/j.tsf.2013.10.022
    Search in Google Scholar
  31. [31] WU K.-R., TING C.-H., WANG J.-J., LIU W.-C., LIN C.-H., Surf. Coat. Tech., 200 (2006), 6030.10.1016/j.surfcoat.2005.09.031
    Search in Google Scholar
  32. [32] KRISHNA D.S.R., SUN Y., CHEN Z., Thin Solid Films, 519 (2011), 4860.10.1016/j.tsf.2011.01.042
    Search in Google Scholar
  33. [33] DOMARADZKI J., KACZMAREK D., ADAMIAK B., DORA J., MAGUDA S., Polish Patent Application, P 395 346, 2011.
    Search in Google Scholar
  34. [34] KLUG H.P., ALEXANDER L.E., X-ray Diffraction Procedures for Polycrystalline and Amorphous Materials, 2nd edition, John Wiley and Sons, New York, 1974.
    Search in Google Scholar
  35. [35] OLIVER W.C., PHARR G.M., J. Mater. Res., 7 (1992), 1564.10.1557/JMR.1992.1564
    Search in Google Scholar
  36. [36] OLIVER W.C., PHARR G.M., J. Mater. Res., 10 (2004), 3.10.1557/jmr.2004.19.1.3
    Search in Google Scholar
  37. [37] FISCHER-CRIPPS A.C., Nanoindentation, Mechanical Engineering Series, Springer-Verlag, New York, 2002.10.1007/978-0-387-22462-6
    Search in Google Scholar
  38. [38] JUNG Y.G., LAWN B.R., MARTYNIUK M., HUANG H., HU X.Z., J. Mater. Res., 19 (2004), 3076.10.1557/JMR.2004.0380
    Search in Google Scholar
  39. [39] ROY S., Int. J. Fracture, 144 (2007), 21.10.1007/s10704-007-9072-7
    Search in Google Scholar
  40. [40] KARIMPOUR M., Comp. Mater. Sci., 68 (2013), 384.10.1016/j.commatsci.2012.11.007
    Search in Google Scholar
  41. [41] KATARIA S., Thin Solid Films, 522 (2012), 297.10.1016/j.tsf.2012.09.001
    Search in Google Scholar
  42. [42] Powder Diffraction File, Joint Committee on Powder Diffraction Standards, Philadelphia, PA: ASTM; 1967 Card 21-1272.
    Search in Google Scholar
  43. [43] Powder Diffraction File. Joint Committee on Powder Diffraction Standards. Philadelphia, PA: ASTM; 1967Card 21-1276.
    Search in Google Scholar
DOI: https://doi.org/10.1515/msp-2015-0084 | Journal eISSN: 2083-134X | Journal ISSN: 2083-1331
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Language: English
Page range: 660 - 668
Submitted on: Mar 9, 2015
|
Accepted on: May 20, 2015
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Published on: Aug 30, 2016
Published by: Wroclaw University of Science and Technology
In partnership with: Paradigm Publishing Services
Publication frequency: 4 issues per year
Keywords:
plasma modulated magnetron sputtering,
titanium dioxide,
hardness,
scratch resistance,
optical and structural properties
Related subjects:
Materials sciences,
Materials sciences, other,
Nanomaterials,
Functional and smart materials,
Materials characterization and properties

© 2016 Damian Wojcieszak, Michał Mazur, Joanna Indyka, Aleksandra Jurkowska, Małgorzata Kalisz, Piotr Domanowski, Danuta Kaczmarek, Jarosław Domaradzki, published by Wroclaw University of Science and Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

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